Author Details
Морозов, О. В.
| Issue | Section | Title | File |
| Vol 88, No 4 (2024) | Ion-Surface Interactions | Dynamics of deposition and removal of a fluorocarbon film in the cyclic process of plasma-chemical etching of silicon |
| Issue | Section | Title | File |
| Vol 88, No 4 (2024) | Ion-Surface Interactions | Dynamics of deposition and removal of a fluorocarbon film in the cyclic process of plasma-chemical etching of silicon |